SUSS MicroTec - UK Lithography Conference

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Rutherford Appleton Laboratory

Chilton

Didcot

OX11 0DE

United Kingdom

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Bookings now CLOSED. Please contact us if you have not registered and would still like to attend: 01264 334505 - matt.brown@inseto.co.uk

We welcome you and your colleagues to register and attend the first SUSS MicroTec "UK Lithography Conference" designed to educate, inform and to provide networking opportunities with other participants from research and industry.

The event is being hosted by Rutherford Appleton Laboratory and is free for all respective delegates (refreshments, lunch and parking also included).

The days agenda is as follows:

08:30 Registration, Networking, Tea & Coffee
09:15 Session One: Surface Preparation
- Optimum substrate selection and material properties - Mr Ian Burnett, Inseto
- Innovative polymer materials for multi-layer devices - Domonique Bouwes, Micronit GmbH
- Recent developments in coating technology & launch of the LabCluster - Mr Tim Bruchmueller, Product Manager Coater
11:00 Session Two: Exposure
- Mask Aligner: Tips and innovative techniques to improve resolution (Fresnel Zone Plate) - Dr Mark Hennemeyer, Director Application Centre, Lithography
- Improving proximity resolution using diffracting elements - Dr Mark Hennemeyer, Director Application Centre, Lithography
- Updated results about LED Lamp House on manual & automatic mask aligner - Mr Christof Kronseder, Product Manager Mask Aligner
12:30 - 13:30 Lunch & Networking & Poster Session
13:30 Session Three: Imprint / Applications
- Comparative presentation of imprint material & their application & solution to improve life time & COO of stamp - Dr Simon Drieschen, Imprint Application Engineer
- Imprint of monolithic lenses - Dr Simon Drieschen, Imprint Application Engineer
- User case study: Application demonstration on SCIL process - Swansea University - Dr Chung Man
15:00 RAL Lab Tours (tickets now sold-out, reserve list operating on the day)
16:00 Finish

Note:

1. Space for RAL Lab tours is limited and tickets are now sold-out. We will be operating a reserve list on the day for any available spaces, on a first-come, first-served basis.
2. All spaces subject to confirmation.
3. Please pass on details of the event to any interested party.

Need more information: Matt Brown, Inseto +44 (0)1264 334505 / matt.brown@inseto.co.uk

Date and Time

Location

Rutherford Appleton Laboratory

Chilton

Didcot

OX11 0DE

United Kingdom

View Map

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